Wet Chemical Structuring

Formation of Spacer and Cavity Structures

Lithoglas employs mainly wet chemical structuring processes for defining spacer and cavity structures of very high precision as used in making micro caps for optoelectronics, fluidic structures of MEMS packaging substrates.


Typical materials structured by Lithoglas wet chemical processes are silicon and different glass materials. For creating highly precise glass micro-structures on a wide range of different surfaces Lithoglas’ deposition technologies can be employed – avoiding wet chemical etching by applying very gentle lift-off processing.

All Lithoglas wet chemical structuring processes are available as contract service.